发明申请
- 专利标题： MANUFACTURING OF OPTICAL STRUCTURES BY ELECTROTHERMAL FOCUSSING
- 专利标题（中）： 通过电热聚焦制造光学结构
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申请号： US12747660申请日： 2008-12-12
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公开(公告)号： US20100314723A1公开(公告)日： 2010-12-16
- 发明人: Christian Schmidt , Leander Dittmann
- 申请人： Christian Schmidt , Leander Dittmann
- 优先权： DE102007034415.7 20070720
- 国际申请： PCT/EP08/05950 WO 20081212
- 主分类号： H01L29/02
- IPC分类号： H01L29/02 ; H01L21/326
摘要：
This invention relates to methods and devices for the production of optical microstructures or domains in dielectric substrates based on electrothermal focussing. More specifically, the invention relates to a method of introducing a change of dielectric and/or optical properties in a region of an electrically insulating or electrically semiconducting substrate, and to substrates produced by such method.
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