发明申请
US20100314788A1 Production of Ultrafine Particles in a Plasma System Having Controlled Pressure Zones
审中-公开
在具有受控压区的等离子体系统中制造超微粒子
- 专利标题: Production of Ultrafine Particles in a Plasma System Having Controlled Pressure Zones
- 专利标题(中): 在具有受控压区的等离子体系统中制造超微粒子
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申请号: US12824994申请日: 2010-06-28
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公开(公告)号: US20100314788A1公开(公告)日: 2010-12-16
- 发明人: Cheng-Hung Hung , Noel R. Vanier
- 申请人: Cheng-Hung Hung , Noel R. Vanier
- 主分类号: B29B9/00
- IPC分类号: B29B9/00
摘要:
A system and method for making ultrafine particles are disclosed. A high temperature plasma is generated at an inlet end of a plasma chamber into which precursor materials are introduced. A converging member is located adjacent an outlet end of the plasma chamber. During operation, a substantially constant pressure and/or material flow pattern is maintained to reduce or eliminate fouling of the system.
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