发明申请
- 专利标题： SOLID IMMERSION LENS OPTICS ASSEMBLY
- 专利标题（中）： 固体透镜光学组件
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申请号： US12486509申请日： 2009-06-17
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公开(公告)号： US20100321678A1公开(公告)日： 2010-12-23
- 发明人: Lian Ser Koh , Choon Meng Chua , Wah Pheng Chua , Chee Hong Jacob Phang , Soon Huat Tan
- 申请人： Lian Ser Koh , Choon Meng Chua , Wah Pheng Chua , Chee Hong Jacob Phang , Soon Huat Tan
- 申请人地址： SG Singapore
- 专利权人： SEMICAPS PTE LTD
- 当前专利权人： SEMICAPS PTE LTD
- 当前专利权人地址： SG Singapore
- 主分类号： G01N21/956
- IPC分类号： G01N21/956 ; G02B7/02
摘要：
A solid immersion lens optics assembly, a test station for probing and testing of integrated circuits on a semiconductor wafer, and a method of landing a SIL on an object. The optics assembly comprises an objective lens housing for receiving an objective lens, and a solid immersion lens (SIL) housing for mounting an SIL and adapted for connection to the objective lens housing; wherein a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL.
公开/授权文献
- US08072699B2 Solid immersion lens optics assembly 公开/授权日：2011-12-06
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