发明申请
- 专利标题： FLAT DISPLAY PANEL, UV SENSOR AND FABRICATION METHOD THEREOF
- 专利标题（中）： 平面显示面板，紫外线传感器及其制造方法
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申请号： US12709506申请日： 2010-02-21
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公开(公告)号： US20100327289A1公开(公告)日： 2010-12-30
- 发明人: An-Thung Cho , Chi-Hua Sheng , Ruei-Liang Luo , Wan-Yi Liu , Wei-Min Sun , Chi-Mao Hung , Chun-Hsiun Chen , Wei-Ming Huang
- 申请人： An-Thung Cho , Chi-Hua Sheng , Ruei-Liang Luo , Wan-Yi Liu , Wei-Min Sun , Chi-Mao Hung , Chun-Hsiun Chen , Wei-Ming Huang
- 优先权： TW098121817 20090629
- 主分类号： H01L33/16
- IPC分类号： H01L33/16 ; H01L33/00 ; H01L31/18
摘要：
A UV sensor comprises a silicon-rich dielectric layer with a refractive index in a range of about 1.7 to about 2.5 for serving as the light sensing material of the UV sensor. The fabrication method of the UV sensor can be integrated with the fabrication process of semiconductor devices or flat display panels.