发明申请
US20110003024A1 METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET
审中-公开
用于生产无分离晶体薄片的方法和装置
- 专利标题： METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET
- 专利标题（中）： 用于生产无分离晶体薄片的方法和装置
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申请号： US12877753申请日： 2010-09-08
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公开(公告)号： US20110003024A1公开(公告)日： 2011-01-06
- 发明人: Peter L. KELLERMAN , Frank Sinclair , Frederick Carlson
- 申请人： Peter L. KELLERMAN , Frank Sinclair , Frederick Carlson
- 申请人地址： US MA Gloucester
- 专利权人： VERIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人： VERIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人地址： US MA Gloucester
- 主分类号： B29D7/01
- IPC分类号： B29D7/01
摘要：
A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.