发明申请
US20110003457A1 SEMICONDUCTOR COMPONENT WITH TRENCH INSULATION AND CORRESPONDING PRODUCTION METHOD
有权
具有TRENCH绝缘和相应生产方法的半导体元件
- 专利标题: SEMICONDUCTOR COMPONENT WITH TRENCH INSULATION AND CORRESPONDING PRODUCTION METHOD
- 专利标题(中): 具有TRENCH绝缘和相应生产方法的半导体元件
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申请号: US12883023申请日: 2010-09-15
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公开(公告)号: US20110003457A1公开(公告)日: 2011-01-06
- 发明人: Franz Schuler , Georg Tempel
- 申请人: Franz Schuler , Georg Tempel
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 优先权: DE10233208.8 20020722
- 主分类号: H01L21/762
- IPC分类号: H01L21/762
摘要:
The invention relates to a semiconductor component with trench isolation and to an associated fabrication method, a trench isolation (STI, TTI) having a deep isolation trench with a covering insulation layer (10, 11), a side wall insulation layer (6) and an electrically conductive filling layer (7), which is electrically connected to a predetermined doping region (1) of the semiconductor substrate in a bottom region of the trench. The use of a trench contact (DTC), which has a deep contact trench with a side wall insulation layer (6) and an electrically conductive filling layer (7), which is likewise electrically connected to the predetermined doping region (1) of the semiconductor substrate in a bottom region of the contact trench, makes it possible to improve the electrical shielding properties with a reduced area requirement.