发明申请
US20110011746A1 Aqueous, Acid Bath and Method for the Electrolytic Deposition of Copper 有权
水溶液,酸浴和电解沉积铜的方法

Aqueous, Acid Bath and Method for the Electrolytic Deposition of Copper
摘要:
To generate a very uniform copper deposit in particular in blind micro vias (BMVs) and trenches, an aqueous, acid bath for the electrolytic deposition of copper is provided, said bath containing at least one copper ion source, at least one acid ion source, at least one brightener compound and at least one leveler compound, wherein at least one leveler compound is selected from the group comprising synthetically produced non-functionalized peptides and synthetically produced functionalized peptides and synthetically produced functionalized amino acids.
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