发明申请
- 专利标题： SOLAR CELL, AND METHOD AND APPARATUS FOR MANUFACTURING THE SAME
- 专利标题（中）： 太阳能电池及其制造方法和装置
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申请号： US12933829申请日： 2009-04-21
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公开(公告)号： US20110020976A1公开(公告)日： 2011-01-27
- 发明人: Miwa Watai , Kazuya Saito , Takashi Komatsu , Atsushi Ota , Shunji Kuroiwa , Miho Shimizu
- 申请人： Miwa Watai , Kazuya Saito , Takashi Komatsu , Atsushi Ota , Shunji Kuroiwa , Miho Shimizu
- 申请人地址： JP Chigasaki-shi
- 专利权人： ULVAC, INC.
- 当前专利权人： ULVAC, INC.
- 当前专利权人地址： JP Chigasaki-shi
- 优先权： JP2008-115977 20080425
- 国际申请： PCT/JP2009/057905 WO 20090421
- 主分类号： H01L31/18
- IPC分类号： H01L31/18
摘要：
A method for manufacturing a solar cell, includes: forming, on a silicon substrate whose conductivity type is p-type or n-type, a silicon layer including a dopant whose conductivity type is different from that of the silicon substrate; and diffusing the dopant included in the silicon layer into the silicon substrate by heat-treating the silicon layer.
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