发明申请
US20110024867A1 CMOS IMAGE SENSOR BIG VIA BONDING PAD APPLICATION FOR AlCu PROCESS
有权
CMOS图像传感器通过用于AlCu工艺的粘合片应用
- 专利标题: CMOS IMAGE SENSOR BIG VIA BONDING PAD APPLICATION FOR AlCu PROCESS
- 专利标题(中): CMOS图像传感器通过用于AlCu工艺的粘合片应用
-
申请号: US12616652申请日: 2009-11-11
-
公开(公告)号: US20110024867A1公开(公告)日: 2011-02-03
- 发明人: Uway Tseng , Lin-June Wu , Yu-Ting Lin
- 申请人: Uway Tseng , Lin-June Wu , Yu-Ting Lin
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L31/02
- IPC分类号: H01L31/02
摘要:
An integrated circuit includes a substrate having a bonding pad region and a non-bonding pad region. A relatively large via, called a “big via,” is formed on the substrate in the bonding region. The big via has a first dimension in a top view toward the substrate. The integrated circuit also includes a plurality of vias formed on the substrate in the non-bonding region. The plurality of vias each have a second dimension in the top view, the second dimension being substantially less than the first dimension.
公开/授权文献
信息查询
IPC分类: