发明申请
US20110029117A1 ION IMPLANTER, ION IMPLANTATION METHOD AND PROGRAM 有权
离子植入物,离子植入方法和程序

  • 专利标题: ION IMPLANTER, ION IMPLANTATION METHOD AND PROGRAM
  • 专利标题(中): 离子植入物,离子植入方法和程序
  • 申请号: US12935781
    申请日: 2009-03-24
  • 公开(公告)号: US20110029117A1
    公开(公告)日: 2011-02-03
  • 发明人: Yasuyuki Tsuji
  • 申请人: Yasuyuki Tsuji
  • 国际申请: PCT/JP2009/055796 WO 20090324
  • 主分类号: G05B13/04
  • IPC分类号: G05B13/04 H01J1/50 H01J37/317 G05B13/02
ION IMPLANTER, ION IMPLANTATION METHOD AND PROGRAM
摘要:
The ion implanter includes lens elements that arrange unit lens elements along a direction of a beam width of a ribbon ion beam and regulate a magnetic field or electric field to be created by each unit lens element in order to regulate a current density distribution of the ion beam, and a controlling portion that sets the intensity of the magnetic field or electric field to be created by the unit lens element to be regulated by the lens elements in accordance with the measured current density distribution. The regulation intensity of the magnetic field or electric field to be created by the unit lens element that corresponds to a position to be regulated in the unit lens elements of the lens elements is determined from the measured current density distribution and a value obtained by multiplying the determined regulation intensity by a fixed ratio is determined as the regulation intensity of the magnetic field or electric field for the magnetic field or electric field to be created by a unit lens element adjacent to the unit lens element.
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