发明申请
- 专利标题： IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS
- 专利标题（中）： 图像形成方法和充电颗粒光束装置
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申请号： US12907912申请日： 2010-10-19
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公开(公告)号： US20110032176A1公开(公告)日： 2011-02-10
- 发明人: Atsushi KOBARU , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
- 申请人： Atsushi KOBARU , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
- 优先权： JP2005-221185 20050729; JP2005-338009 20051124
- 主分类号： G09G1/06
- IPC分类号： G09G1/06
摘要：
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
公开/授权文献
- US08203504B2 Image forming method and charged particle beam apparatus 公开/授权日：2012-06-19
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