发明申请
US20110032590A1 MEANDERING OSCILLATOR, OPTICAL REFLECTING ELEMENT USING MEANDERING OSCILLATOR, AND IMAGE PROJECTION DEVICE USING MEANDERING OSCILLATOR
有权
使用振动振荡器的光学振荡器，光学反射元件和使用振动振荡器的图像投影设备
- 专利标题： MEANDERING OSCILLATOR, OPTICAL REFLECTING ELEMENT USING MEANDERING OSCILLATOR, AND IMAGE PROJECTION DEVICE USING MEANDERING OSCILLATOR
- 专利标题（中）： 使用振动振荡器的光学振荡器，光学反射元件和使用振动振荡器的图像投影设备
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申请号： US12937299申请日： 2009-04-23
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公开(公告)号： US20110032590A1公开(公告)日： 2011-02-10
- 发明人: Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa , Kiyomi Furukawa , Kazuki Komaki
- 申请人： Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa , Kiyomi Furukawa , Kazuki Komaki
- 申请人地址： JP Osaka
- 专利权人： Panasonic Corporation
- 当前专利权人： Panasonic Corporation
- 当前专利权人地址： JP Osaka
- 优先权： JP2008-115054 20080425
- 国际申请： PCT/JP2009/001852 WO 20090423
- 主分类号： G02B27/18
- IPC分类号： G02B27/18 ; H01L41/047 ; G02B26/08
摘要：
A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
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