发明申请
- 专利标题： Micromechanical component, light-deflecting device, and manufacturing methods for a micromechanical component and a light-deflecting device
- 专利标题（中）： 微机械部件，光偏转装置以及微机械部件和光偏转装置的制造方法
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申请号： US12804490申请日： 2010-07-21
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公开(公告)号： US20110032591A1公开(公告)日： 2011-02-10
- 发明人: Reinhold Fiess , Joerg Muchow
- 申请人： Reinhold Fiess , Joerg Muchow
- 优先权： KR102009028356.0 20090807
- 主分类号： G02B26/08
- IPC分类号： G02B26/08 ; G02B26/00 ; H05K13/00
摘要：
A micromechanical component includes: a mirror element with a reflective surface on a first outer side of the mirror element, which is designed in such a way that a first potential is applied to a first electrode surface on a second outer side of the mirror element opposite from the first outer side; a counterelectrode situated adjacent to the second outer side of the mirror element and which is designed in such a way that a second potential is applied to a second electrode surface of the counterelectrode; and a voltage control unit configured to apply a temporally varying voltage signal between the first electrode surface and the second electrode surface
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