发明申请
- 专利标题: Sensor for Biomolecules
- 专利标题(中): 生物分子传感器
-
申请号: US12537063申请日: 2009-08-06
-
公开(公告)号: US20110033952A1公开(公告)日: 2011-02-10
- 发明人: Marwan H. Khater , Tak H. Ning , Lidija Sekaric , Sufi Zafar
- 申请人: Marwan H. Khater , Tak H. Ning , Lidija Sekaric , Sufi Zafar
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: G01N33/543
- IPC分类号: G01N33/543 ; H01L29/78
摘要:
A sensor for biomolecules includes a silicon fin comprising undoped silicon; a source region adjacent to the silicon fin, the source region comprising heavily doped silicon; a drain region adjacent to the silicon fin, the drain region comprising heavily doped silicon of a doping type that is the same doping type as that of the source region; and a layer of a gate dielectric covering an exterior portion of the silicon fin between the source region and the drain region, the gate dielectric comprising a plurality of antibodies, the plurality of antibodies configured to bind with the biomolecules, such that a drain current flowing between the source region and the drain region varies when the biomolecules bind with the antibodies.
公开/授权文献
- US09029132B2 Sensor for biomolecules 公开/授权日:2015-05-12