Invention Application
US20110038093A1 TURNABLE CAPACITOR AND SWITCH USING MEMS WITH PHASE CHANGE MATERIAL
审中-公开
使用具有相变材料的MEMS开关电容器和开关
- Patent Title: TURNABLE CAPACITOR AND SWITCH USING MEMS WITH PHASE CHANGE MATERIAL
- Patent Title (中): 使用具有相变材料的MEMS开关电容器和开关
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Application No.: US12988223Application Date: 2009-04-17
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Publication No.: US20110038093A1Publication Date: 2011-02-17
- Inventor: Yukiko Furukawa , Klaus Reimann , Christina Adriana Renders , Liesbeth Van Pieterson , Jin Liu , Friso Jacobus Jedema
- Applicant: Yukiko Furukawa , Klaus Reimann , Christina Adriana Renders , Liesbeth Van Pieterson , Jin Liu , Friso Jacobus Jedema
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP08154837.2 20080418
- International Application: PCT/IB2009/051606 WO 20090417
- Main IPC: H01G7/00
- IPC: H01G7/00 ; H01L29/93 ; H01L21/02
Abstract:
The present invention relates to a MEMS, being developed for e.g. a mobile communication application, such as switch, tunable capacitor, tunable filter, phase shifter, multiplexer, voltage controlled oscillator, and tunable matching network. The volume change of phase-change layer is used for a bi-stable actuation of the MEMS device. The MEMS device comprises at least a bendable cantilever, a phase change layer, and electrodes. A process to implement this device and a method for using is given.
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