发明申请
US20110039380A1 Method for Forming a Floating Gate Non-Volatile Memory Cell 有权
浮动门非易失性记忆体的形成方法

  • 专利标题: Method for Forming a Floating Gate Non-Volatile Memory Cell
  • 专利标题(中): 浮动门非易失性记忆体的形成方法
  • 申请号: US12836545
    申请日: 2010-07-14
  • 公开(公告)号: US20110039380A1
    公开(公告)日: 2011-02-17
  • 发明人: Pieter Blomme
  • 申请人: Pieter Blomme
  • 申请人地址: BE Leuven
  • 专利权人: IMEC
  • 当前专利权人: IMEC
  • 当前专利权人地址: BE Leuven
  • 优先权: EP09167749.2 20090812
  • 主分类号: H01L21/336
  • IPC分类号: H01L21/336
Method for Forming a Floating Gate Non-Volatile Memory Cell
摘要:
Method for manufacturing a non-volatile memory comprising at least one array of memory cells on a substrate of a semiconductor material, the memory cells being self-aligned to and separated from each other by STI structures, the memory cells comprising a floating gate having an inverted-T shape in a cross section along the array of memory cells, wherein the inverted T shape is formed by oxidizing an upper part of the sidewalls of the floating gates thereby forming sacrificial oxide, and subsequently removing the sacrificial oxide simultaneously with further etching back the STI structures.
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