发明申请
US20110042723A1 SOLID-STATE IMAGING DEVICE, ELECTRONIC APPARATUS, AND METHOD FOR MAKING SOLID-STATE IMAGING DEVICE 失效
固态成像装置,电子装置和制造固态成像装置的方法

  • 专利标题: SOLID-STATE IMAGING DEVICE, ELECTRONIC APPARATUS, AND METHOD FOR MAKING SOLID-STATE IMAGING DEVICE
  • 专利标题(中): 固态成像装置,电子装置和制造固态成像装置的方法
  • 申请号: US12854597
    申请日: 2010-08-11
  • 公开(公告)号: US20110042723A1
    公开(公告)日: 2011-02-24
  • 发明人: Keiji Mabuchi
  • 申请人: Keiji Mabuchi
  • 申请人地址: JP Tokyo
  • 专利权人: SONY CORPORATION
  • 当前专利权人: SONY CORPORATION
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP2009-191133 20090820
  • 主分类号: H01L31/08
  • IPC分类号: H01L31/08 H01L31/18 H01L31/14
SOLID-STATE IMAGING DEVICE, ELECTRONIC APPARATUS, AND METHOD FOR MAKING SOLID-STATE IMAGING DEVICE
摘要:
A solid-state imaging device includes a photoelectric conversion unit that includes a first region of a first conductivity type and a second region of a second conductivity type between which a pn junction is formed, the first region and the second region being formed in a signal-readout surface of a semiconductor substrate, the second region being located at a position deeper than the first region; and a transfer transistor configured to transfer signal charges accumulated in the photoelectric conversion unit to a readout drain through a channel region that lies under a surface of the first region and horizontally adjacent to the photoelectric conversion unit, the transfer transistor being formed in the signal-readout surface. The transfer transistor includes a transfer gate electrode that extends from above the channel region with a gate insulating film therebetween to above the first region so as to extend across a step.
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