发明申请
- 专利标题: SOLID-STATE IMAGING DEVICE, ELECTRONIC APPARATUS, AND METHOD FOR MAKING SOLID-STATE IMAGING DEVICE
- 专利标题(中): 固态成像装置,电子装置和制造固态成像装置的方法
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申请号: US12854597申请日: 2010-08-11
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公开(公告)号: US20110042723A1公开(公告)日: 2011-02-24
- 发明人: Keiji Mabuchi
- 申请人: Keiji Mabuchi
- 申请人地址: JP Tokyo
- 专利权人: SONY CORPORATION
- 当前专利权人: SONY CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-191133 20090820
- 主分类号: H01L31/08
- IPC分类号: H01L31/08 ; H01L31/18 ; H01L31/14
摘要:
A solid-state imaging device includes a photoelectric conversion unit that includes a first region of a first conductivity type and a second region of a second conductivity type between which a pn junction is formed, the first region and the second region being formed in a signal-readout surface of a semiconductor substrate, the second region being located at a position deeper than the first region; and a transfer transistor configured to transfer signal charges accumulated in the photoelectric conversion unit to a readout drain through a channel region that lies under a surface of the first region and horizontally adjacent to the photoelectric conversion unit, the transfer transistor being formed in the signal-readout surface. The transfer transistor includes a transfer gate electrode that extends from above the channel region with a gate insulating film therebetween to above the first region so as to extend across a step.
公开/授权文献
- US08399914B2 Method for making solid-state imaging device 公开/授权日:2013-03-19
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