发明申请
- 专利标题： MICROPROBE, MEASUREMENT SYSTEM AND METHOD
- 专利标题（中）： MICROPROBE，测量系统和方法
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申请号： US12742813申请日： 2008-11-17
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公开(公告)号： US20110047661A1公开(公告)日： 2011-02-24
- 发明人: Richard Leach , Ben Hughes , Alan Wilson
- 申请人： Richard Leach , Ben Hughes , Alan Wilson
- 申请人地址： GB Middlesex
- 专利权人： The Secretary of State for Innovations Universities & Skills
- 当前专利权人： The Secretary of State for Innovations Universities & Skills
- 当前专利权人地址： GB Middlesex
- 优先权： GBGB0722477.7 20071115
- 国际申请： PCT/GB08/03846 WO 20081117
- 主分类号： G01Q20/00
- IPC分类号： G01Q20/00 ; G01Q70/08
摘要：
A microprobe, measurement system and method are disclosed. The microprobe includes a probe tip mounted at a meeting point of a plurality of flexures. The probe tip is moveable upon flexing of one or more of the flexures, each flexure further comprising one or more actuators controllable to flex the flexure and one or more sensors arranged to sense flexin of the flexure.
公开/授权文献
- US08484755B2 Microprobe, measurement system and method 公开/授权日：2013-07-09
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