发明申请
US20110049366A1 RESISTIVE MATERIAL FOR BOLOMETER, BOLOMETER FOR INFRARED DETECTOR USING THE MATERIAL, AND METHOD OF MANUFACTURING THE BOLOMETER
有权
用于使用该材料的红外探测器的玻璃体,BOLOMETER的电阻材料及其制造方法
- 专利标题: RESISTIVE MATERIAL FOR BOLOMETER, BOLOMETER FOR INFRARED DETECTOR USING THE MATERIAL, AND METHOD OF MANUFACTURING THE BOLOMETER
- 专利标题(中): 用于使用该材料的红外探测器的玻璃体,BOLOMETER的电阻材料及其制造方法
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申请号: US12859466申请日: 2010-08-19
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公开(公告)号: US20110049366A1公开(公告)日: 2011-03-03
- 发明人: Woo Seok Yang , Sang Hoon Cheon , Seong Mok Cho , Ho Jun Ryu , Chang Auck Choi
- 申请人: Woo Seok Yang , Sang Hoon Cheon , Seong Mok Cho , Ho Jun Ryu , Chang Auck Choi
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2009-0082675 20090902; KR10-2010-0026290 20100324
- 主分类号: H01L31/09
- IPC分类号: H01L31/09 ; H01L31/18 ; C09K3/00
摘要:
A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.
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