发明申请
- 专利标题: Electro-Mechanical Transistor
- 专利标题(中): 机电晶体管
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申请号: US12549906申请日: 2009-08-28
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公开(公告)号: US20110049650A1公开(公告)日: 2011-03-03
- 发明人: Sandip Tiwari , Moon-Kyung Kim , Joshua Mark Rubin , Soo-Doo Chae , Choong-Man Lee , Ravishankar Sundararaman
- 申请人: Sandip Tiwari , Moon-Kyung Kim , Joshua Mark Rubin , Soo-Doo Chae , Choong-Man Lee , Ravishankar Sundararaman
- 主分类号: H01L29/84
- IPC分类号: H01L29/84
摘要:
An electromechanical transistor includes a source electrode and a drain electrode spaced apart from each other. A source pillar is between the substrate and the source electrode. A drain pillar is between the substrate and the drain electrode. A moveable channel is spaced apart from the source electrode and the drain electrode. A gate nano-pillar is between the moveable channel and the substrate. A first dielectric layer is between the moveable channel and the gate nano-pillar. A second dielectric layer is between the source pillar and the source electrode. A third dielectric layer is between the drain pillar and the drain electrode.
公开/授权文献
- US08080839B2 Electro-mechanical transistor 公开/授权日:2011-12-20
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