发明申请
- 专利标题: REDUCED ISOTROPIC ETCHANT MATERIAL CONSUMPTION AND WASTE GENERATION
- 专利标题(中): 减少等温蚀刻材料消耗和废物产生
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申请号: US12871662申请日: 2010-08-30
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公开(公告)号: US20110056913A1公开(公告)日: 2011-03-10
- 发明人: Steven T. Mayer , David W. Porter
- 申请人: Steven T. Mayer , David W. Porter
- 主分类号: C23F1/46
- IPC分类号: C23F1/46 ; C23F1/08 ; C23F1/00
摘要:
Methods and apparatus for isotropically etching a metal from a work piece, while recovering and reconstituting the chemical etchant are described. Various embodiments include apparatus and methods for etching where the recovered and reconstituted etchant is reused in a continuous loop recirculation scheme. Steady state conditions can be achieved where these processes are repeated over and over with occasional bleed and feed to replenish reagents and/or adjust parameters such as pH, ionic strength, salinity and the like.
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