发明申请
- 专利标题: FLEXURAL VIBRATION PIECE, FLEXURAL VIBRATOR, AND ELECTRONIC DEVICE
- 专利标题(中): 柔性振动片,柔性振动器和电子装置
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申请号: US12748714申请日: 2010-03-29
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公开(公告)号: US20110057549A1公开(公告)日: 2011-03-10
- 发明人: Hiroki KAWAI , Makoto FURUHATA , Akinori YAMADA , Yuji HAMAYAMA
- 申请人: Hiroki KAWAI , Makoto FURUHATA , Akinori YAMADA , Yuji HAMAYAMA
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: SEIKO EPSON CORPORATION,EPSON TOYOCOM CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION,EPSON TOYOCOM CORPORATION
- 当前专利权人地址: JP Tokyo JP Tokyo
- 优先权: JP2009-206783 20090908; JP2010-063861 20100319
- 主分类号: H01L41/053
- IPC分类号: H01L41/053 ; H01L41/04
摘要:
A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other.
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