The present invention relates to a seal carrier plate and a system of interchangeable chambers. A seal carrier plate is provided, wherein the seal carrier plate is adapted for being located between a first chamber and a second chamber and adapted for sealing the first chamber with respect to the second chamber from the environment, and wherein the seal carrier plate comprises an opening for transferring of substrates from the first chamber to the second chamber. Further, a system of interchangeable chambers is provided, wherein the chambers are adapted for accommodating a seal carrier plate on at least one side of the chamber with an opening.