发明申请
- 专利标题: EXTENSION -MODE ANGULAR VELOCITY SENSOR
- 专利标题(中): 扩展 - 角速度传感器
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申请号: US12558398申请日: 2009-09-11
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公开(公告)号: US20110061460A1公开(公告)日: 2011-03-17
- 发明人: JOSEPH SEEGER , BRUNO BOROVIC
- 申请人: JOSEPH SEEGER , BRUNO BOROVIC
- 申请人地址: US CA SUNNYVALE
- 专利权人: INVENSENSE, INC
- 当前专利权人: INVENSENSE, INC
- 当前专利权人地址: US CA SUNNYVALE
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.
公开/授权文献
- US08534127B2 Extension-mode angular velocity sensor 公开/授权日:2013-09-17
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