发明申请
US20110069154A1 HIGH SPEED, HIGH RESOLUTION, THREE DIMENSIONAL SOLAR CELL INSPECTION SYSTEM 有权
高速,高分辨率,三维太阳能电池检测系统

HIGH SPEED, HIGH RESOLUTION, THREE DIMENSIONAL SOLAR CELL INSPECTION SYSTEM
摘要:
An optical inspection system and method are provided. A workpiece transport moves a workpiece in a nonstop manner. An illuminator includes a light pipe and is configured to provide a first and second strobed illumination field types. First and second arrays of cameras are arranged to provide stereoscopic imaging of the workpiece. The first array of cameras is configured to generate a first plurality of images of the workpiece with the first illumination field and a second plurality of images of the feature with the second illumination field. The second array of cameras is configured to generate a third plurality of images of the workpiece with the first illumination field and a fourth plurality of images of the feature with the second illumination field. A processing device stores at least some of the first, second, third, and fourth pluralities of images and provides the images to an other device.
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