发明申请
- 专利标题: REGENERATIVE RING RESONATOR
- 专利标题(中): 再生环谐振器
-
申请号: US12724681申请日: 2010-03-16
-
公开(公告)号: US20110069733A1公开(公告)日: 2011-03-24
- 发明人: Hong Ye , Richard L. Sandstrom , Slava Rokitski , Daniel J.W. Brown , Robert J. Rafac
- 申请人: Hong Ye , Richard L. Sandstrom , Slava Rokitski , Daniel J.W. Brown , Robert J. Rafac
- 申请人地址: US CA San Diego
- 专利权人: CYMER INC.
- 当前专利权人: CYMER INC.
- 当前专利权人地址: US CA San Diego
- 主分类号: H01S3/08
- IPC分类号: H01S3/08
摘要:
A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the laser beam. The beam modification optical system transversely expands a profile of the laser beam such that the near field laser beam profile uniformly fills each aperture within the laser and such that the regenerative ring resonator remains either conditionally stable or marginally unstable when operating the laser at powers that induce thermal lenses in optical elements inside the regenerative ring resonator.
公开/授权文献
- US08014432B2 Regenerative ring resonator 公开/授权日:2011-09-06
信息查询