Invention Application
- Patent Title: SEMICONDUCTOR DEVICE WITH ONE-SIDE-CONTACT AND METHOD FOR FABRICATING THE SAME
- Patent Title (中): 具有单面接触的半导体器件及其制造方法
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Application No.: US12649999Application Date: 2009-12-30
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Publication No.: US20110073940A1Publication Date: 2011-03-31
- Inventor: Jin-Ku LEE , Young-Ho Lee , Mi-Ri Lee
- Applicant: Jin-Ku LEE , Young-Ho Lee , Mi-Ri Lee
- Priority: KR10-2009-0093500 20090930
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336

Abstract:
A method for fabricating a semiconductor device includes forming a first conductive layer doped with an impurity for forming a cell junction over a semiconductor substrate, forming a second conductive layer over the first conductive layer, forming a plurality of active regions by etching the second conductive layer and the first conductive layer, the plurality of the active regions being separated from one another by trenches, forming a side contact connected to a sidewall of the first conductive layer, and forming a plurality of metal bit lines each connected to the side contact and filling a portion of each trench.
Public/Granted literature
- US08349690B2 Semiconductor device with one-side-contact and method for fabricating the same Public/Granted day:2013-01-08
Information query
IPC分类: