发明申请
- 专利标题: CATADIOPTRIC PROJECTION OBJECTIVE
- 专利标题(中): 目标投影目标
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申请号: US12748862申请日: 2010-03-29
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公开(公告)号: US20110075121A1公开(公告)日: 2011-03-31
- 发明人: Alexander Epple , Toralf Gruner , Ralf Mueller
- 申请人: Alexander Epple , Toralf Gruner , Ralf Mueller
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE102009045217.6 20090930
- 主分类号: G03B27/72
- IPC分类号: G03B27/72 ; G02B17/06
摘要:
Catadioptric projection objective (1) for microlithography for imaging an object field (3) in an object plane (5) onto an image field (7) in an image plane (9), including a first partial objective (11) imaging the object field onto a first real intermediate image (13), a second partial objective (15) imaging the first intermediate image onto a second real intermediate image (17) and a third partial objective (19) imaging the second intermediate image onto the image field (7). The second partial objective (15) has exactly one concave mirror (21) and at least one lens (23). The minimum distance between an optically utilized region of the concave mirror (21) and an optically utilized region of a surface (25)—facing the concave mirror—of a lens (23) adjacent to the concave mirror is greater than 10 mm.
公开/授权文献
- US08300211B2 Catadioptric projection objective 公开/授权日:2012-10-30
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