发明申请
US20110075254A1 Surface Wave Enabled Darkfield Aperture 有权
表面波使能暗场光圈

Surface Wave Enabled Darkfield Aperture
摘要:
Embodiments of the present invention relate to a surface wave enabled darkfield aperture structure comprising an aperture layer, a aperture in the aperture layer and a plurality of grooves around the aperture. The aperture layer has a first and second surface. The plurality of grooves is in the first surface. A surface wave propagates along at least the first surface. The plurality of grooves is configured to generate a darkfield at the aperture by modifying the surface wave to cancel out direct transmission of a uniform incident light field received by the aperture.
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