Invention Application
US20110079079A1 YAW RATE SENSOR, YAW RATE SENSOR SYSTEM, AND METHOD FOR OPERATING A YAW RATE SENSOR
有权
YAW RATE传感器,YAW RATE传感器系统和操作YAW RATE传感器的方法
- Patent Title: YAW RATE SENSOR, YAW RATE SENSOR SYSTEM, AND METHOD FOR OPERATING A YAW RATE SENSOR
- Patent Title (中): YAW RATE传感器,YAW RATE传感器系统和操作YAW RATE传感器的方法
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Application No.: US12897367Application Date: 2010-10-04
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Publication No.: US20110079079A1Publication Date: 2011-04-07
- Inventor: Johannes CLASSEN , Torsten Ohms , Daniel Cgristoph Meisel , Joerg Hauer
- Applicant: Johannes CLASSEN , Torsten Ohms , Daniel Cgristoph Meisel , Joerg Hauer
- Priority: DE102009045420.9 20091007
- Main IPC: G01P3/44
- IPC: G01P3/44

Abstract:
A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction.
Public/Granted literature
- US08915137B2 Yaw rate sensor, yaw rate sensor system, and method for operating a yaw rate sensor Public/Granted day:2014-12-23
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