Invention Application
US20110079080A1 Micromechanical structure and method for operating a micromechanical structure 有权
微机械结构的微机械结构和操作方法

  • Patent Title: Micromechanical structure and method for operating a micromechanical structure
  • Patent Title (中): 微机械结构的微机械结构和操作方法
  • Application No.: US12924756
    Application Date: 2010-10-05
  • Publication No.: US20110079080A1
    Publication Date: 2011-04-07
  • Inventor: Daniel Christoph Meisel
  • Applicant: Daniel Christoph Meisel
  • Priority: DE102009045431.4 20091007
  • Main IPC: G01C19/56
  • IPC: G01C19/56
Micromechanical structure and method for operating a micromechanical structure
Abstract:
A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a second vibration which is antiparallel to the first vibration. A first deflection of the first Coriolis element and a second deflection of the second Coriolis element, in each case along a first direction which is parallel to the main plane of extension and perpendicular to the second direction, may be detected. The micromechanical sensor also has a rocker element indirectly or directly coupled to the first Coriolis element and to the second Coriolis element, which rocker element has a torsional axis essentially parallel to the second direction.
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