发明申请
- 专利标题: PLANARIZATION OVER TOPOGRAPHY WITH MOLECULAR GLASS MATERIALS
- 专利标题(中): 分子结构与分子玻璃材料的平面化
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申请号: US12574171申请日: 2009-10-06
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公开(公告)号: US20110079579A1公开(公告)日: 2011-04-07
- 发明人: Robert D. Allen , Mark W. Hart , Ratnam Sooriyakumaran
- 申请人: Robert D. Allen , Mark W. Hart , Ratnam Sooriyakumaran
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: B44C1/22
- IPC分类号: B44C1/22 ; B29C39/12 ; C09D4/00
摘要:
Molecular glass based planarizing compositions for lithographic processing are disclosed. The processes generally include casting the planarizing composition onto a surface comprised of lithographic features, the planarizing composition comprising at least one molecular glass and at least one solvent; and heating the planarizing composition to a temperature greater than a glass transition temperature of the at least one molecular glass. Exemplary molecular glasses include polyhedral oligomeric silsesquioxane derivatives, calixarenes, cyclodextrin derivatives, and other non-polymeric large molecules.