发明申请
US20110085220A1 OPTICAL SCANNING DEVICE, IMAGE FORMING APPARATUS, AND IMAGE PROJECTION DEVICE
有权
光学扫描装置,图像形成装置和图像投影装置
- 专利标题: OPTICAL SCANNING DEVICE, IMAGE FORMING APPARATUS, AND IMAGE PROJECTION DEVICE
- 专利标题(中): 光学扫描装置,图像形成装置和图像投影装置
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申请号: US12888814申请日: 2010-09-23
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公开(公告)号: US20110085220A1公开(公告)日: 2011-04-14
- 发明人: Eiji MOCHIZUKI
- 申请人: Eiji MOCHIZUKI
- 优先权: JP2009-234219 20091008; JP2010-176119 20100805
- 主分类号: G02B26/10
- IPC分类号: G02B26/10
摘要:
An optical scanning device includes a substrate, a frame, a torsion beam, and a cantilever. The substrate has a three-layer structure including an oxide film sandwiched between two silicon substrates. The torsion beam swingably supports a mirror portion which deflects a light beam projected from a light source. The cantilever is supported by the frame to connect to the torsion beam and applies torque to the torsion beam. The cantilever and the torsion beam are formed on the same silicon substrate. The cantilever has a thickness substantially thinner than the thickness of the torsion beam. An image forming apparatus includes the optical scanning device. An image projection device includes the optical scanning device.
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