发明申请
- 专利标题: POSITIVE RESIST COMPOSITION AND METHOD FOR PRODUCTION OF MICROLENS
- 专利标题(中): 阳性抗菌组合物和生产微生物的方法
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申请号: US12996684申请日: 2009-07-07
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公开(公告)号: US20110086310A1公开(公告)日: 2011-04-14
- 发明人: Shojiro Yukawa , Takahiro Kishioka , Takahiro Sakaguchi , Hiroyuki Soda
- 申请人: Shojiro Yukawa , Takahiro Kishioka , Takahiro Sakaguchi , Hiroyuki Soda
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-184524 20080716
- 国际申请: PCT/JP2009/062379 WO 20090707
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/20
摘要:
There is provided a positive resist composition excellent in transparency, heat resistance, and refractive index particularly for forming a microlens and for forming a planarization film; and a microlens and a planarization film formed from the positive resist composition. A positive resist composition comprising a component (A): an alkali-soluble polymer comprising a unit structure having a biphenyl structure; a component (B): a compound having an organic group to be photolyzed to generate an alkali-soluble group; and a component (C): a solvent. The positive resist composition wherein the alkali-soluble polymer as the component (A) is a polymer comprising a unit structure of Formula (1): where when the total number of unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A) satisfies 0.3≦n1≦1.0.
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