发明申请
US20110089139A1 PROCESS FOR FABRICATING ULTRA-NARROW DIMENSION MAGNETIC SENSOR 有权
制造超窄尺寸磁传感器的方法

  • 专利标题: PROCESS FOR FABRICATING ULTRA-NARROW DIMENSION MAGNETIC SENSOR
  • 专利标题(中): 制造超窄尺寸磁传感器的方法
  • 申请号: US12581030
    申请日: 2009-10-16
  • 公开(公告)号: US20110089139A1
    公开(公告)日: 2011-04-21
  • 发明人: Liubo Hong
  • 申请人: Liubo Hong
  • 主分类号: B44C1/22
  • IPC分类号: B44C1/22
PROCESS FOR FABRICATING ULTRA-NARROW DIMENSION MAGNETIC SENSOR
摘要:
A method for manufacturing a magnetoresistive read sensor that allows the sensor to be constructed with clean well defined side junctions, even at very narrow track widths. The method involves using first and second etch mask layers, that are constructed of materials such that the second mask (formed over the first mask) can act as a mask during the patterning of the first mask (bottom mask). The first mask has a well defined thickness that is defined by deposition and which is not affected by the etching processes used to define the mask. This allows the total ion milling etch mask thickness to be well controlled before the ion milling process used to define the sensor side walls.
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