发明申请
US20110089322A1 ACHROMATIC BEAM DEFLECTOR, ACHROMATIC BEAM SEPARATOR, CHARGED PARTICLE DEVICE, METHOD OF OPERATING AN ACHROMATIC BEAM DEFLECTOR, AND METHOD OF OPERATING AN ACHROMATIC BEAM SEPARATOR
有权
ACHROMATIC BEAM偏转器，ACHROMATIC BEAM分离器，充电颗粒装置，操作ACHROMATIC BEAM偏转器的方法和操作ANHROMATIC BEAM分离器的方法
- 专利标题： ACHROMATIC BEAM DEFLECTOR, ACHROMATIC BEAM SEPARATOR, CHARGED PARTICLE DEVICE, METHOD OF OPERATING AN ACHROMATIC BEAM DEFLECTOR, AND METHOD OF OPERATING AN ACHROMATIC BEAM SEPARATOR
- 专利标题（中）： ACHROMATIC BEAM偏转器，ACHROMATIC BEAM分离器，充电颗粒装置，操作ACHROMATIC BEAM偏转器的方法和操作ANHROMATIC BEAM分离器的方法
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申请号： US12579869申请日： 2009-10-15
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公开(公告)号： US20110089322A1公开(公告)日： 2011-04-21
- 发明人: Gerald SCHOENECKER , Stefan LANIO
- 申请人： Gerald SCHOENECKER , Stefan LANIO
- 申请人地址： DE Heimstetten
- 专利权人： ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- 当前专利权人： ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- 当前专利权人地址： DE Heimstetten
- 主分类号： G01N23/00
- IPC分类号： G01N23/00 ; H01J1/50 ; H01J37/28
摘要：
An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.
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