发明申请
- 专利标题： MEMS PROCESS AND DEVICE
- 专利标题（中）： MEMS工艺和器件
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申请号： US12673925申请日： 2008-08-15
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公开(公告)号： US20110089504A1公开(公告)日： 2011-04-21
- 发明人: Anthony Bernard Traynor , Richard Ian Laming , Tsjerk Hans Hoekstra
- 申请人： Anthony Bernard Traynor , Richard Ian Laming , Tsjerk Hans Hoekstra
- 优先权： GB0716188.8 20070717
- 国际申请： PCT/GB08/02772 WO 20080815
- 主分类号： H01L29/84
- IPC分类号： H01L29/84 ; H01L21/02
摘要：
A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane (5) on a substrate (3), and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion (7a) and a second back-volume portion (7b), the first back-volume portion (7a) being separated from the second back-volume portion (7b) by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion (7b) can be made greater than the cross-sectional area of the membrane (5), thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane (5). The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.
公开/授权文献
- US08546170B2 MEMS process and device 公开/授权日：2013-10-01
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