发明申请
- 专利标题： APPARATUS FOR DETECTING ARCS
- 专利标题（中）： 检测ARCS的装置
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申请号： US12772598申请日： 2010-05-03
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公开(公告)号： US20110090503A1公开(公告)日： 2011-04-21
- 发明人: Kang LEE , Sang Jeen HONG , Sang Youl LEE , Jong Hwan Ahn
- 申请人： Kang LEE , Sang Jeen HONG , Sang Youl LEE , Jong Hwan Ahn
- 优先权： KR10-2009-0098004 20091015
- 主分类号： G01N21/25
- IPC分类号： G01N21/25 ; G08B17/10
摘要：
An apparatus for detecting arc that can monitor inside of process chamber sensitively and promptly can be provided, and abnormal condition of plasma in process chamber can be detected. And, by installing RGB sensor portion independently or installing the RGB sensor portion in master board, flexibility in configuration can be provided.
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