发明申请
- 专利标题: Micromechanical assembly having a displaceable component
- 专利标题(中): 具有可移位部件的微机械组件
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申请号: US12893778申请日: 2010-09-29
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公开(公告)号: US20110090551A1公开(公告)日: 2011-04-21
- 发明人: Tjalf PIRK , Stefan Pinter , Joachim Fritz , Christoph Friese
- 申请人: Tjalf PIRK , Stefan Pinter , Joachim Fritz , Christoph Friese
- 优先权: DE102009045720.8 20091015
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; H02N1/00
摘要:
A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.
公开/授权文献
- US08384975B2 Micromechanical assembly having a displaceable component 公开/授权日:2013-02-26
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