发明申请
US20110096314A1 OPTICAL DEVICE, EXPOSURE APPARATUS USING SAME, AND DEVICE MANUFACTURING METHOD
审中-公开
光学装置,使用其的曝光装置和装置制造方法
- 专利标题: OPTICAL DEVICE, EXPOSURE APPARATUS USING SAME, AND DEVICE MANUFACTURING METHOD
- 专利标题(中): 光学装置,使用其的曝光装置和装置制造方法
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申请号: US12902654申请日: 2010-10-12
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公开(公告)号: US20110096314A1公开(公告)日: 2011-04-28
- 发明人: Takeshi Sato
- 申请人: Takeshi Sato
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-245290 20091026
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03B27/32 ; G02B7/02
摘要:
The optical device of the present invention includes an optical element; a first holding member that holds the optical element; and a second holding member that holds the first holding member via a plurality of connections, and has a linear expansion coefficient different from that of each one of the optical element and the first holding member. When the plurality of connections are displaced upon receiving a force depending on the difference of the linear expansion coefficients between the first holding member and the second holding member, the first holding member causes the connection to the optical element to be displaced in a predetermined direction different from the displacement. The predetermined direction is the opposite direction of a force received by the connection between the optical element and the first holding member, depending on the difference of the linear expansion coefficients between the optical element and the second holding member.
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