Invention Application
- Patent Title: SEMICONDUCTOR DEVICES HAVING REDISTRIBUTION STRUCTURES AND PACKAGES, AND METHODS OF FORMING THE SAME
- Patent Title (中): 具有重新分配结构和包装的半导体器件及其形成方法
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Application No.: US12797837Application Date: 2010-06-10
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Publication No.: US20110104888A1Publication Date: 2011-05-05
- Inventor: Ki-Hyuk KIM , Nam-Seog Kim , Hyun-Soo Chung , Seok-Ho Kim , Myeong-Soon Park , Chang-Woo Shin
- Applicant: Ki-Hyuk KIM , Nam-Seog Kim , Hyun-Soo Chung , Seok-Ho Kim , Myeong-Soon Park , Chang-Woo Shin
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR2009-0104503 20091030
- Main IPC: H01L21/768
- IPC: H01L21/768

Abstract:
Semiconductor devices and methods of forming the same, including forming a chip pad on a chip substrate, forming a passivation layer on the chip pad and the chip substrate, forming a first insulation layer on the passivation layer, forming a recess and a first opening in the first insulation layer, forming a second opening in the passivation layer to correspond to the first opening, forming a redistribution line in a redistribution line area of the recess, the first opening, and the second opening, forming a second insulation layer on the redistribution line and the first insulation layer, and forming an opening in the second insulation to expose a portion of the redistribution line as a redistribution pad.
Public/Granted literature
- US08431479B2 Semiconductor devices having redistribution structures and packages, and methods of forming the same Public/Granted day:2013-04-30
Information query
IPC分类: