发明申请
- 专利标题: SEMICONDUCTOR DEVICES HAVING REDISTRIBUTION STRUCTURES AND PACKAGES, AND METHODS OF FORMING THE SAME
- 专利标题(中): 具有重新分配结构和包装的半导体器件及其形成方法
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申请号: US12797837申请日: 2010-06-10
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公开(公告)号: US20110104888A1公开(公告)日: 2011-05-05
- 发明人: Ki-Hyuk KIM , Nam-Seog Kim , Hyun-Soo Chung , Seok-Ho Kim , Myeong-Soon Park , Chang-Woo Shin
- 申请人: Ki-Hyuk KIM , Nam-Seog Kim , Hyun-Soo Chung , Seok-Ho Kim , Myeong-Soon Park , Chang-Woo Shin
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR2009-0104503 20091030
- 主分类号: H01L21/768
- IPC分类号: H01L21/768
摘要:
Semiconductor devices and methods of forming the same, including forming a chip pad on a chip substrate, forming a passivation layer on the chip pad and the chip substrate, forming a first insulation layer on the passivation layer, forming a recess and a first opening in the first insulation layer, forming a second opening in the passivation layer to correspond to the first opening, forming a redistribution line in a redistribution line area of the recess, the first opening, and the second opening, forming a second insulation layer on the redistribution line and the first insulation layer, and forming an opening in the second insulation to expose a portion of the redistribution line as a redistribution pad.
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