发明申请
- 专利标题: PRESSURE CONTROL VALVE DRIVING CIRCUIT FOR PRESSURE TYPE FLOW RATE CONTROL DEVICE WITH FLOW RATE SELF-DIAGNOSIS FUNCTION
- 专利标题(中): 压力型流量控制装置的压力控制阀驱动电路流速自动诊断功能
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申请号: US12989614申请日: 2009-02-18
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公开(公告)号: US20110108138A1公开(公告)日: 2011-05-12
- 发明人: Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
- 申请人: Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
- 申请人地址: JP JP Osaka
- 专利权人: FUJIKIN INCORPORATED
- 当前专利权人: FUJIKIN INCORPORATED
- 当前专利权人地址: JP JP Osaka
- 优先权: JP2008-115479 20080425
- 国际申请: PCT/JP2009/000647 WO 20090218
- 主分类号: F16K31/12
- IPC分类号: F16K31/12
摘要:
A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.