发明申请
US20110116145A1 METHOD OF MANUFACTURING OSCILLATOR DEVICE, AND OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT WITH OSCILLATOR DEVICE
有权
振荡器装置的制造方法以及具有振荡器装置的光学偏转器和光学仪器
- 专利标题: METHOD OF MANUFACTURING OSCILLATOR DEVICE, AND OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT WITH OSCILLATOR DEVICE
- 专利标题(中): 振荡器装置的制造方法以及具有振荡器装置的光学偏转器和光学仪器
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申请号: US12674325申请日: 2008-11-13
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公开(公告)号: US20110116145A1公开(公告)日: 2011-05-19
- 发明人: Kazunari Fujii , Takahisa Kato , Yoshio Hotta , Suguru Miyagawa , Takahiro Akiyama
- 申请人: Kazunari Fujii , Takahisa Kato , Yoshio Hotta , Suguru Miyagawa , Takahiro Akiyama
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-295960 20071114
- 国际申请: PCT/JP2008/071066 WO 20081113
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; B23P17/04
摘要:
A method of manufacturing an oscillator device having first and second oscillators being driven at first and second driving resonance frequencies gf1 and gf2, the method including a first step for processing the two oscillators, wherein, when the two oscillators are going to be processed as oscillators having first and second resonance frequencies different from the two driving resonance frequencies with a certain dispersion range, the two oscillators are so processed that the first and second resonance frequencies different from the two driving resonance frequencies become equal to first and second resonance frequencies f1 and f2, respectively, which are included in adjustable resonance frequency ranges, respectively, and a second step for adjusting the first and second resonance frequencies f1 and f2 so that they become equal to the first and second driving resonance frequencies gf1 and gf2, respectively.