Invention Application
- Patent Title: SAMPLE INSPECTION METHODS, SYSTEMS AND COMPONENTS
- Patent Title (中): 样本检查方法，系统和组件
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Application No.: US12997686Application Date: 2009-05-26
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Publication No.: US20110121176A1Publication Date: 2011-05-26
- Inventor: Sybren Sijbrandij , John A. Notte, IV , William B. Thompson
- Applicant: Sybren Sijbrandij , John A. Notte, IV , William B. Thompson
- Applicant Address: US MA Peabody
- Assignee: CARL ZEISS NTS, LLC.
- Current Assignee: CARL ZEISS NTS, LLC.
- Current Assignee Address: US MA Peabody
- International Application: PCT/US09/45131 WO 20090526
- Main IPC: G01N23/225
- IPC: G01N23/225
Abstract:
The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.
Public/Granted literature
- US08669525B2 Sample inspection methods, systems and components Public/Granted day:2014-03-11
Information query
