发明申请
US20110122398A1 Integrated Visible Pilot Beam for Non-Visible Optical Waveguide Devices
审中-公开
用于不可见光波导器件的集成可见光导光束
- 专利标题： Integrated Visible Pilot Beam for Non-Visible Optical Waveguide Devices
- 专利标题（中）： 用于不可见光波导器件的集成可见光导光束
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申请号： US13020372申请日： 2011-02-03
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公开(公告)号： US20110122398A1公开(公告)日： 2011-05-26
- 发明人: David R. Peale
- 申请人： David R. Peale
- 申请人地址： US CA Milpitas
- 专利权人： KLA-TENCOR CORPORATION
- 当前专利权人： KLA-TENCOR CORPORATION
- 当前专利权人地址： US CA Milpitas
- 主分类号： G01B9/02
- IPC分类号： G01B9/02
摘要：
In one embodiment, a radiation based analysis system comprises a first radiation source to generate first radiation having a wavelength outside the visible spectrum, a second radiation source to generate second radiation having a wavelength within the visible spectrum, and a waveguide coupler to couple a portion of the first radiation and a portion of the second radiation into a combined radiation beam such that the first radiation and the second radiation follow a path that is substantially coaxial.