发明申请
- 专利标题: METHOD AND APPARATUS FOR DETERMINING MEASUREMENT VALUES
- 专利标题(中): 用于确定测量值的方法和装置
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申请号: US12376231申请日: 2007-08-03
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公开(公告)号: US20110125443A1公开(公告)日: 2011-05-26
- 发明人: Christoph Merkl
- 申请人: Christoph Merkl
- 优先权: DE102006036585.2 20060804
- 国际申请: PCT/IB07/53077 WO 20070803
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; G01K15/00 ; G06F17/10
摘要:
The present invention describes a method for determining a value for the temperature, radiation, emissivity, transmissivity and/or reflectivity of an object (2) such as a semiconductor wafer in a rapid heating system (1), wherein an output signal from a radiation detector (50) which records temperature radiation from the object is used as a measurement value, and wherein prediction values for the measurement values are calculated in a model system (100). The development over time of the measurement values is compared with the development over time of the prediction values and the measurement value is corrected if the difference exceeds predetermined threshold value.
公开/授权文献
- US08335658B2 Method and apparatus for determining measurement values 公开/授权日:2012-12-18
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