发明申请
- 专利标题： Nanopillar E-Fuse Structure and Process
- 专利标题（中）： 纳米电子保险丝结构与工艺
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申请号： US12627747申请日： 2009-11-30
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公开(公告)号： US20110127637A1公开(公告)日： 2011-06-02
- 发明人: Satya N. Chakravarti , Dechao Guo , Huiming Bu , Keith Kwong Hon Wong
- 申请人： Satya N. Chakravarti , Dechao Guo , Huiming Bu , Keith Kwong Hon Wong
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L23/525
- IPC分类号： H01L23/525 ; H01L21/768
摘要：
Techniques for incorporating nanotechnology into electronic fuse (e-fuse) designs are provided. In one aspect, an e-fuse structure is provided. The e-fuse structure includes a first electrode; a dielectric layer on the first electrode having a plurality of nanochannels therein; an array of metal silicide nanopillars that fill the nanochannels in the dielectric layer, each nanopillar in the array serving as an e-fuse element; and a second electrode in contact with the array of metal silicide nanopillars opposite the first electrode. Methods for fabricating the e-fuse structure are also provided as are semiconductor devices incorporating the e-fuse structure.
公开/授权文献
- US08344428B2 Nanopillar E-fuse structure and process 公开/授权日：2013-01-01
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