发明申请
US20110138593A1 METHOD FOR PRODUCING A MONOLITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, MONOLITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, AND USE OF THE PIEZO ACTUATOR 审中-公开
用于生产具有堆叠元件的单片式致动器的方法,具有堆叠元件的单片式致动器,以及PIEZO致动器的使用

  • 专利标题: METHOD FOR PRODUCING A MONOLITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, MONOLITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, AND USE OF THE PIEZO ACTUATOR
  • 专利标题(中): 用于生产具有堆叠元件的单片式致动器的方法,具有堆叠元件的单片式致动器,以及PIEZO致动器的使用
  • 申请号: US13031398
    申请日: 2011-02-21
  • 公开(公告)号: US20110138593A1
    公开(公告)日: 2011-06-16
  • 发明人: Carsten SchuhClaus Zumstrull
  • 申请人: Carsten SchuhClaus Zumstrull
  • 优先权: DE102005034814.9 20050726
  • 主分类号: H01L41/24
  • IPC分类号: H01L41/24
METHOD FOR PRODUCING A MONOLITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, MONOLITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, AND USE OF THE PIEZO ACTUATOR
摘要:
A piezo actuator has a stack element and at least one further stack element, wherein each of the stack elements has stacked piezoceramic layers and electrode layers arranged between the piezoceramic layers, each of the electrode layers extends to at least one of at least two lateral surface sections of the stack element which have external metallizations on them, and are connected to the electrode layers such that adjacently stacked electrode layers can have different electrical potentials applied to them indirectly via the external metallizations, the stack elements are arranged above one another to form a monolithic total stack, and connected to one another by at least one connecting layer. The following steps are provided: a) provision of the total stack and b) production of a load-relieving crack in the connecting layer. An electrical connector in the form of a wire can be fitted on the relevant external metallization regions.
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