Invention Application
- Patent Title: MULTI-AXIS MAGNETIC LENS
- Patent Title (中): 多轴磁性镜片
-
Application No.: US12636007Application Date: 2009-12-11
-
Publication No.: US20110139996A1Publication Date: 2011-06-16
- Inventor: ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
- Applicant: ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
- Applicant Address: TW HSIN-CHU
- Assignee: HERMES MICROVISION, INC.
- Current Assignee: HERMES MICROVISION, INC.
- Current Assignee Address: TW HSIN-CHU
- Main IPC: H01J1/50
- IPC: H01J1/50
Abstract:
The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.
Public/Granted literature
- US08003953B2 Multi-axis magnetic lens Public/Granted day:2011-08-23
Information query
