发明申请
- 专利标题: CAPACITIVE VIBRATION SENSOR
- 专利标题(中): 电容式振动传感器
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申请号: US13060075申请日: 2009-02-20
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公开(公告)号: US20110140213A1公开(公告)日: 2011-06-16
- 发明人: Takashi Kasia , Nobuyuki Iida , Hidetoshi Nishio
- 申请人: Takashi Kasia , Nobuyuki Iida , Hidetoshi Nishio
- 申请人地址: JP Kyoto-shi, Kyoto
- 专利权人: OMRON CORPORATION
- 当前专利权人: OMRON CORPORATION
- 当前专利权人地址: JP Kyoto-shi, Kyoto
- 优先权: JP2008-218149 20080827
- 国际申请: PCT/JP2009/000727 WO 20090220
- 主分类号: H01L29/84
- IPC分类号: H01L29/84
摘要:
A hollow part is formed in a silicon substrate through the front and the back. A vibration electrode plate is arranged on an upper surface of the silicon substrate to cover the opening on the upper surface. A fixed electrode plate covers the upper side of the vibration electrode plate while maintaining a microscopic gap with the vibration electrode plate, where the peripheral part is fixed to the upper surface of the silicon substrate. The fixed electrode plate has the portion facing the upper surface of the silicon substrate through a space supported by a side wall portion arranged on an inner edge of the portion fixed to the upper surface of the silicon substrate without interposing a space. The outer surface of the side wall portion of the fixed electrode plate is covered by a reinforcement film made of metal such as Au, Cr, and Pt.
公开/授权文献
- US08803257B2 Capacitive vibration sensor 公开/授权日:2014-08-12